This code is a python code with jupyter-lab environment. You can just copy and paste my code to run it, however, using jupyter-lab is recommended.
This is a 2D version of pierremifasol's work(https://github.com/pierremifasol/Lithography-Simulation) about computational lithography.
Dependencies
numpy matplotlib scikit-fmm ipywidgets scipy IPython
File description
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README.md: This file.
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Lithography Simulation_2D.ipynb : 2D version of pierremifasol's code. Only Abbe's formula is implemented. I will update Hopkins' formula further and development process. At this code, there are 3 kind of mask(reticle), a hole, L shape and L shape with OPC.
you can easily overview with below link. https://nbviewer.org/github/lani5677/Computational-lithography/blob/main/Lithography%20Simulation_2D.ipynb
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Lithography Simulation with python.ipynb : same code with pierremifasol's code "Lithography I - Basics"
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Aberration and Defocus.ipynb : same code with pierremifasol's code"Lithography II - Aberrations and Defocus."